Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5441849 | Method of forming pattern and making semiconductor device using radiation-induced conductive resin bottom resist layer | Hiroshi Shiraishi, Takumi Ueno, Fumio Murai, Asao Isobe | 1995-08-15 |
| 5168166 | Charged particle beam projection aligner having position detector using light beam | Kazumitsu Nakamura, Hiroyuki Itoh | 1992-12-01 |