Issued Patents All Time
Showing 51–75 of 75 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7723235 | Method for smoothing a resist pattern prior to etching a layer using the resist pattern | Masaru Kurihara | 2010-05-25 |
| 7720632 | Dimension measuring apparatus and dimension measuring method for semiconductor device | Masaru Kurihara, Junichi Tanaka | 2010-05-18 |
| 7666266 | Surface conditioning prior to chemical conversion treatment of a steel member | Kunio Godo, Yoshihisa Ujita, Takahiro Takano | 2010-02-23 |
| 7662232 | Plasma processing apparatus | Hiroyuki Kobayashi, Kenji Maeda, Kenetsu Yokogawa, Tadamitsu Kanekiyo | 2010-02-16 |
| 7372582 | Method for fabrication semiconductor device | Nobuyuki Negishi, Kenetsu Yokogawa | 2008-05-13 |
| 7371690 | Dry etching method and apparatus | Nobuyuki Negishi, Kenetsu Yokogawa | 2008-05-13 |
| 7145146 | Micro-spectroscopic measuring device and micro-chemical system | Taro Ogawa, Toshiki Sugawara, Kazuhiko Hosomi, Masataka Shirai, Toshio Katsuyama +3 more | 2006-12-05 |
| 7049243 | Surface processing method of a specimen and surface processing apparatus of the specimen | Tetsuo Ono, Yasuhiro Nishimori, Takashi Sato, Naoyuki Kofuji, Yasushi Goto +7 more | 2006-05-23 |
| 6977229 | Manufacturing method for semiconductor devices | Kenetsu Yokogawa, Yoshinori Momonoi | 2005-12-20 |
| 6842658 | Method of manufacturing a semiconductor device and manufacturing system | Masahito Mori, Nobuyuki Negishi, Shinichi Tachi | 2005-01-11 |
| 6784109 | Method for fabricating semiconductor devices including wiring forming with a porous low-k film and copper | Naoyuki Kofuji | 2004-08-31 |
| 6756092 | Surface treated steel material, a method for its manufacture, and a chemical conversion treatment liquid | Kunio Goto | 2004-06-29 |
| 6677244 | Specimen surface processing method | Tetsuo Ono, Yasuhiro Nishimori, Takashi Sato, Naoyuki Kofuji, Yasushi Goto +7 more | 2004-01-13 |
| 6673685 | Method of manufacturing semiconductor devices | Masahito Mori, Naoshi Itabashi | 2004-01-06 |
| 6645870 | Process for fabricating semiconductor device | Nobuyuki Negishi | 2003-11-11 |
| 6643893 | Apparatus for cleaning semiconductor wafers in a vacuum environment | Yoshinori Momonoi, Kenetsu Yokogawa, Shinichi Tachi | 2003-11-11 |
| 6629538 | Method for cleaning semiconductor wafers in a vacuum environment | Kenetsu Yokogawa, Yoshinori Momonoi, Shinichi Tachi | 2003-10-07 |
| 6607988 | Manufacturing method of semiconductor integrated circuit device | Takashi Yunogami, Yoshitaka Nakamura, Kazuo Nojiri, Sukeyoshi Tsunekawa, Toshiyuki Arai +3 more | 2003-08-19 |
| 6573190 | Dry etching device and dry etching method | Shinichi Tachi, Kenetsu Yokogawa, Nobuyuki Negishi, Naoyuki Kofuji | 2003-06-03 |
| 6551445 | Plasma processing system and method for manufacturing a semiconductor device by using the same | Ken'etsu Yokogawa, Yoshinori Momonoi, Nobuyuki Negishi, Shinichi Tachi | 2003-04-22 |
| 6506674 | Method of manufacturing a semiconductor integrated circuit device | Takenobu Ikeda, Masahiro Tadokoro, Takashi Yunogami | 2003-01-14 |
| 6506687 | Dry etching device and method of producing semiconductor devices | Shinichi Tachi | 2003-01-14 |
| 6492277 | Specimen surface processing method and apparatus | Tetsuo Ono, Yasuhiro Nishimori, Takashi Sato, Naoyuki Kofuji, Yasushi Goto +7 more | 2002-12-10 |
| 6475918 | Plasma treatment apparatus and plasma treatment method | Kenetsu Yokogawa, Nobuyuki Negishi, Yoshinori Momonoi, Shinichi Tachi | 2002-11-05 |
| 5928441 | Hot rolling method of steel products and hot rolling roll for steel products | Yoshiaki Kusaba, Kenji Tsubouchi | 1999-07-27 |