Issued Patents All Time
Showing 26–50 of 75 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9490104 | Heat treatment apparatus | Ken'etsu Yokogawa, Masatoshi Miyake, Takashi Uemura, Satoshi Sakai | 2016-11-08 |
| 9368377 | Plasma processing apparatus | Takumi Tandou, Kenetsu Yokogawa | 2016-06-14 |
| 9150964 | Vacuum processing apparatus | Hiroyuki Kobayashi, Kenetsu Yokogawa, Kenji Maeda | 2015-10-06 |
| 9070724 | Vacuum processing apparatus and plasma processing apparatus with temperature control function for wafer stage | Takumi Tandou | 2015-06-30 |
| 9038567 | Plasma processing apparatus | Hiroyuki Kobayashi, Kenji Maeda, Kenetsu Yokogawa, Tadamitsu Kanekiyo | 2015-05-26 |
| 8955579 | Plasma processing apparatus and plasma processing method | Takumi Tandou, Kenetsu Yokogawa | 2015-02-17 |
| 8833089 | Plasma processing apparatus and maintenance method therefor | Takumi Tandou | 2014-09-16 |
| 8733282 | Plasma processing apparatus | Hiroyuki Kobayashi, Kenji Maeda, Kenetsu Yokogawa, Tadamitsu Kanekiyo | 2014-05-27 |
| 8632688 | Plasma processing apparatus and plasma processing method | Kouichi Yamamoto, Kenji Nakata, Atsushi Itou | 2014-01-21 |
| 8496781 | Plasma processing apparatus | Kenetsu Yokogawa, Kenji Maeda | 2013-07-30 |
| 8491751 | Plasma processing apparatus | Hiroyuki Kobayashi | 2013-07-23 |
| 8426764 | Plasma processing apparatus and plasma processing method | Takumi Tandou, Kenetsu Yokogawa | 2013-04-23 |
| 8397668 | Plasma processing apparatus | Hiroyuki Kobayashi, Kenji Maeda, Kenetsu Yokogawa, Tadamitsu Kanekiyo | 2013-03-19 |
| 8349127 | Vacuum processing apparatus and plasma processing apparatus with temperature control function for wafer stage | Takumi Tandou | 2013-01-08 |
| 8333847 | Chemical conversion treatment liquid | Kunio Goto | 2012-12-18 |
| 8197635 | Plasma processing apparatus including etching processing apparatus and ashing processing apparatus and plasma processing method using plasma processing apparatus | Hiroyuki Kobayashi | 2012-06-12 |
| 8187485 | Plasma processing apparatus including etching processing apparatus and ashing processing apparatus and plasma processing method using plasma processing apparatus | Hiroyuki Kobayashi | 2012-05-29 |
| 8142567 | Vacuum processing apparatus | Hiroyuki Kobayashi, Kenji Maeda, Makoto Nawata | 2012-03-27 |
| 8034181 | Plasma processing apparatus | Takumi Tandou, Ken'etsu Yokogawa | 2011-10-11 |
| 8029874 | Plasma processing apparatus and method for venting the same to atmosphere | Hiroyuki Kobayashi, Kenji Maeda, Kenetsu Yokogawa | 2011-10-04 |
| 7918945 | Method for manufacturing surface treated steel material using a chemical conversion treatment liquid | Kunio Goto | 2011-04-05 |
| 7915055 | Manufacturing method of semiconductor device | Masaru Kurihara, Junichi Tanaka | 2011-03-29 |
| 7842619 | Plasma processing method | Masatoshi Miyake, Kenji Maeda, Kenetsu Yokogawa | 2010-11-30 |
| 7838792 | Plasma processing apparatus capable of adjusting temperature of sample stand | Takumi Tandou, Ken'etsu Yokogawa, Seiichiro Kanno | 2010-11-23 |
| 7767054 | Plasma processing apparatus | Hiroyuki Kobayashi, Kenetsu Yokogawa, Tomoyuki Tamura, Kenji Maeda | 2010-08-03 |