KY

Katsushi Yagi

HH Hitachi High-Technologies: 1 patents #1,282 of 1,917Top 70%
Overall (All Time): #2,911,238 of 4,157,543Top 75%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10090160 Dry etching apparatus and method Masahito Mori, Masaru Izawa 2018-10-02