Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12125708 | Etching method | Takashi Hattori, Yu Zhao, Hiroyuki Kobayashi | 2024-10-22 |
| 11901192 | Etching processing method and etching processing apparatus | Takashi Hattori | 2024-02-13 |
| 11295960 | Etching method | Takashi Hattori, Masaki Yamada, Michael A. Walker, Catherine King | 2022-04-05 |
| 11217454 | Plasma processing method and etching apparatus | Kazunori Shinoda, Hiroyuki Kobayashi, Kohei Kawamura, Masaru Izawa | 2022-01-04 |