Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12211674 | Plasma processing apparatus | Shunsuke Tashiro, Takashi Uemura | 2025-01-28 |
| 12014908 | Vacuum processing apparatus | — | 2024-06-18 |
| 11776792 | Plasma processing apparatus and plasma processing method | Shunsuke Tashiro, Takashi Uemura, Yasushi Sonoda, Kiyohiko Sato, Masahiro Nagatani | 2023-10-03 |