Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12211674 | Plasma processing apparatus | Shengnan Yu, Takashi Uemura | 2025-01-28 |
| 11776792 | Plasma processing apparatus and plasma processing method | Takashi Uemura, Shengnan Yu, Yasushi Sonoda, Kiyohiko Sato, Masahiro Nagatani | 2023-10-03 |