Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5759424 | Plasma processing apparatus and processing method | Ichiro Sasaki, Toru Otsubo, Hitoshi Tamura, Takashi Kamimura | 1998-06-02 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5759424 | Plasma processing apparatus and processing method | Ichiro Sasaki, Toru Otsubo, Hitoshi Tamura, Takashi Kamimura | 1998-06-02 |