Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4721553 | Method and apparatus for microwave assisting sputtering | Hiroshi Saito, Yasumichi Suzuki, Tamotsu Shimizu, Susumu Aiuchi | 1988-01-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4721553 | Method and apparatus for microwave assisting sputtering | Hiroshi Saito, Yasumichi Suzuki, Tamotsu Shimizu, Susumu Aiuchi | 1988-01-26 |