Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4405435 | Apparatus for performing continuous treatment in vacuum | Hideki Tateishi, Tsuneaki Kamei, Katsuo Abe, Shigeru Kobayashi, Susumu Aiuchi +2 more | 1983-09-20 |
| 4379743 | Sputtering apparatus comprising control means for preventing impurity gases from entering a sputtering chamber | Nobuyuki Takahashi | 1983-04-12 |