Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12195853 | Substrate processing apparatus, method of manufacturing semiconductor device, substrate processing method, and recording medium | Hiroshi NAKAJO | 2025-01-14 |
| 10604839 | Substrate processing apparatus, method of manufacturing semiconductor device, and method of processing substrate | Tetsuaki INADA, Yuichi Wada, Mitsunori Ishisaka, Mitsuhiro Hirano, Sadayoshi Horii +2 more | 2020-03-31 |
| 9373499 | Batch-type remote plasma processing apparatus | Kazuyuki Toyoda, Yasuhiro Inokuchi, Tadashi Kontani, Nobuo Ishimaru | 2016-06-21 |
| 9039912 | Batch-type remote plasma processing apparatus | Kazuyuki Toyoda, Yasuhiro Inokuchi, Tadashi Kontani, Nobuo Ishimaru | 2015-05-26 |
| 8544411 | Batch-type remote plasma processing apparatus | Kazuyuki Toyoda, Yasuhiro Inokuchi, Tadashi Kontani, Nobuo Ishimaru | 2013-10-01 |
| 8518182 | Substrate processing apparatus | Shizue Ogawa, Kazuyuki Toyoda, Tadashi Kontani, Nobuo Ishimaru | 2013-08-27 |
| 8444363 | Substrate processing apparatus | Masakazu Sakata, Akira Takahashi, Hidehiro Yanai, Shinya Tanaka | 2013-05-21 |
| 8028652 | Batch-type remote plasma processing apparatus | Kazuyuki Toyoda, Yasuhiro Inokuchi, Tadashi Kontani, Nobuo Ishimaru | 2011-10-04 |
| 8020514 | Batch-type remote plasma processing apparatus | Kazuyuki Toyoda, Yasuhiro Inokuchi, Tadashi Kontani, Nobuo Ishimaru | 2011-09-20 |
| 7958842 | Substrate processing apparatus | Shizue Ogawa, Kazuyuki Toyoda, Tadashi Kontani, Nobuo Ishimaru | 2011-06-14 |
| 7861668 | Batch-type remote plasma processing apparatus | Kazuyuki Toyoda, Yasuhiro Inokuchi, Tadashi Kontani, Nobuo Ishimaru | 2011-01-04 |