Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9184069 | Heating apparatus, substrate processing apparatus employing the same, method of manufacturing semiconductor devices, and insulator | Akira Hayashida, Masaaki Ueno, Masakazu Shimada, Masashi Sugishita, Toshimitsu Miyata +2 more | 2015-11-10 |
| 8158911 | Heating apparatus, substrate processing apparatus employing the same, method of manufacturing semiconductor devices, and extending member | Akira Hayashida, Masaaki Ueno, Masakazu Shimada, Kimio Kitamura, Kenji Tanaka | 2012-04-17 |
| 8116618 | Heating apparatus, substrate processing apparatus, and method of manufacturing semiconductor devices | Akira Hayashida, Masaaki Ueno, Masakazu Shimada, Masashi Sugishita, Toshimitsu Miyata +2 more | 2012-02-14 |