Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11198935 | Heating part, substrate processing apparatus, and method of manufacturing semiconductor device | Shinobu Sugiura, Yosuke KUWATA, Tomoyasu Miyashita, Atsushi UMEKAWA, Kazuhiro Kimura +2 more | 2021-12-14 |
| 7849873 | Heater unit for installation on valve | Tsuguhiro Nomoto | 2010-12-14 |