Issued Patents All Time
Showing 26–38 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D819463 | Protector tube for thermocouple | Tokunobu Akao, Atushi Umekawa, Masaaki Ueno, Hitoshi Murata, Masashi Sugishita +1 more | 2018-06-05 |
| D818850 | Protector tube for thermocouple | Tokunobu Akao, Atushi Umekawa, Masaaki Ueno, Hitoshi Murata, Masashi Sugishita +1 more | 2018-05-29 |
| D803075 | Thermometry tool for substrate processing apparatus | Tokunobu Akao, Motoya Takewaki, Akihiro Osaka, Masaaki Ueno, Masashi Sugishita | 2017-11-21 |
| 9779970 | Heater supporting device | Hitoshi Murata, Shinobu Sugiura, Masaaki Ueno | 2017-10-03 |
| 9695511 | Substrate processing apparatus, method of manufacturing semiconductor device and method of processing substrate | Hitoshi Murata, Masaaki Ueno, Masashi Sugishita | 2017-07-04 |
| 9587884 | Insulation structure and method of manufacturing semiconductor device | Motoya Takewaki, Hitoshi Murata, Masaaki Ueno | 2017-03-07 |
| 9460946 | Substrate processing apparatus and heating equipment | Hitoshi Murata | 2016-10-04 |
| 9449849 | Method of manufacturing semiconductor device using meander-shaped heating element | Hitoshi Murata, Shinobu Sugiura | 2016-09-20 |
| 9269638 | Temperature detecting apparatus, substrate processing apparatus and method of manufacturing semiconductor device | Masaaki Ueno, Hideto Yamaguchi | 2016-02-23 |
| 9064912 | Heating device, substrate processing apparatus, and method of manufacturing semiconductor device | Hitoshi Murata, Shinobu Sugiura, Masaaki Ueno | 2015-06-23 |
| 8847124 | Heating device having a meander-shaped heating element with an insulating body accomodating the same, and the substrate processing apparatus including the same | Hitoshi Murata, Shinobu Sugiura | 2014-09-30 |
| 8822240 | Temperature detecting apparatus, substrate processing apparatus and method of manufacturing semiconductor device | Masaaki Ueno, Hideto Yamaguchi | 2014-09-02 |
| 8535444 | Substrate processing apparatus, method of manufacturing semiconductor device, and ceiling insulating part | Hitoshi Murata, Shinobu Sugiura | 2013-09-17 |