Issued Patents All Time
Showing 26–42 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9607827 | Method of manufacturing semiconductor device, and recording medium | Yoshiro Hirose, Atsushi Sano | 2017-03-28 |
| 9520282 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshiro Hirose, Tsukasa Kamakura, Atsushi Sano, Yugo Orihashi | 2016-12-13 |
| 9472397 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshiro Hirose, Atsushi Sano | 2016-10-18 |
| 9460914 | Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium | Yoshiro Hirose, Atsushi Sano | 2016-10-04 |
| 9443718 | Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium | Yoshiro Hirose, Atsushi Sano | 2016-09-13 |
| 9431240 | Method of manufacturing semiconductor device | Yoshiro Hirose, Atsushi Sano, Satoshi Shimamoto | 2016-08-30 |
| 9190298 | Film forming method and recording medium for performing the method | Yoshiro Hirose, Tsukasa Kamakura, Atsushi Sano, Yugo Orihashi | 2015-11-17 |
| 7976807 | Method for detoxifying HCD gas and apparatus therefor | Hiroshi Imamura, Hiroaki Takeuchi, Koji Ishikawa, Hiroshi Suzuki, Akira Moriya | 2011-07-12 |
| 7488693 | Method for producing silicon oxide film | Hiroaki Takeuchi, Satoshi Hattori, Hiroshi Suzuki | 2009-02-10 |
| 7005532 | Process of producing alkoxysilanes | Eiichi Suzuki, Masaki Okamoto, Seitaro Tajima, Hiroshi Suzuki | 2006-02-28 |
| 6796874 | Toy vehicle with shock absorbing steering mechanism | — | 2004-09-28 |
| 6664224 | Quaternary ammonium salt and process for the preparation thereof | Hiroki Kourai, Shigeyuki Shibata, Masayoshi Kume | 2003-12-16 |
| 5985229 | Solid silica derivative and process for producing the same | Yoshinori Yamada | 1999-11-16 |
| 5556999 | Alkoxysilane composition inhibited from disproportionation reaction | Yoshinori Yamada, Mitsutaka Hasegawa | 1996-09-17 |
| 5362897 | Process for producing trialkoxysilanes | Yoshinori Yamada | 1994-11-08 |
| 5260471 | Process for producing trialkoxysilane | Yoshinori Yamada | 1993-11-09 |
| 5221412 | Vapor-phase epitaxial growth process by a hydrogen pretreatment step followed by decomposition of disilane to form monocrystalline Si film | Yoshikazu Kagata | 1993-06-22 |