Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424437 | Processing method, method of manufacturing semiconductor device, processing apparatus, and recording medium | Masaya NAGATO, Takashi Ozaki, Yoshitomo HASHIMOTO, Katsuyoshi Harada | 2025-09-23 |
| 11978623 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Katsuyoshi Harada, Kimihiko NAKATANI, Yoshiro Hirose, Masaya NAGATO +1 more | 2024-05-07 |
| 11961733 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Masaya NAGATO, Takashi Ozaki, Yoshitomo HASHIMOTO, Katsuyoshi Harada | 2024-04-16 |
| 11527402 | Method of processing substrate, substrate processing apparatus, recording medium, and method of manufacturing semiconductor device | Yoshitomo HASHIMOTO, Katsuyoshi Harada, Kimihiko NAKATANI, Yoshiro Hirose, Masaya NAGATO +1 more | 2022-12-13 |