Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D997892 | End effector for handling wafers | Satoshi Aizawa, Kiyoaki Yamada | 2023-09-05 |
| 11359283 | Reaction tube structure and substrate processing apparatus | Satoru Murata, Kosuke Takagi, Atsushi Hirano, Kiyoaki Yamada, Haruo Morikawa | 2022-06-14 |
| 8070880 | Substrate processing apparatus | Yasuhiro Inokuchi | 2011-12-06 |
| 8071477 | Method of manufacturing semiconductor device and substrate processing apparatus | Atsushi Moriya, Yasuhiro Inokuchi | 2011-12-06 |
| 6332898 | Substrate processing apparatus and maintenance method therefor | Kouji Tometsuka, Mitsuhiro Hirano | 2001-12-25 |
| 6143040 | Substrate processing apparatus and maintenance method therefor | Kouji Tometsuka, Mitsuhiro Hirano | 2000-11-07 |