Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D997892 | End effector for handling wafers | Satoshi Aizawa, Tetsuya Marubayashi | 2023-09-05 |
| 11359283 | Reaction tube structure and substrate processing apparatus | Tetsuya Marubayashi, Satoru Murata, Kosuke Takagi, Atsushi Hirano, Haruo Morikawa | 2022-06-14 |