Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12421609 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takuya JODA, Arito OGAWA | 2025-09-23 |
| 12170206 | Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus | Arito OGAWA, Norikazu Mizuno, Atsuhiko Ashitani, Kota KOWA | 2024-12-17 |
| 12148621 | Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus | Koei KURIBAYASHI, Arito OGAWA | 2024-11-19 |
| 12084760 | Method of processing substrate, recording medium, substrate processing apparatus, and method of manufacturing semiconductor device | Takuya JODA, Arito OGAWA | 2024-09-10 |
| 12084757 | Method of manufacturing semiconductor device, substrate processing apparatus, method of processing substrate, and recording medium | Arito OGAWA | 2024-09-10 |
| 11967500 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Arito OGAWA | 2024-04-23 |
| 11915938 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Arito OGAWA | 2024-02-27 |
| 11621169 | Method of manufacturing semiconductor device, recording medium, and substrate processing apparatus | Koei KURIBAYASHI, Arito OGAWA | 2023-04-04 |
| 11538688 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Arito OGAWA | 2022-12-27 |
| 11424127 | Method of manufacturing semiconductor device, substrate processing apparatus, method of processing substrate, and recording medium | Arito OGAWA | 2022-08-23 |
| 10734218 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Arito OGAWA | 2020-08-04 |
| 10410870 | Method of manufacturing semiconductor device | Arito OGAWA | 2019-09-10 |
| 9972500 | Method of manufacturing semiconductor device | Yukinao KAGA, Arito OGAWA, Atsuhiko Ashitani, Ryohei Maeno, Masanori Sakai | 2018-05-15 |
| 9970107 | Method of manufacturing semiconductor device | Arito OGAWA | 2018-05-15 |
| 9966268 | Method of manufacturing semiconductor device and substrate processing apparatus | Arito OGAWA | 2018-05-08 |
| 9653351 | Method of manufacturing semiconductor device | Arito OGAWA | 2017-05-16 |
| 9508555 | Method of manufacturing semiconductor device | Yukinao KAGA, Arito OGAWA, Atsuhiko Ashitani, Ryohei Maeno, Masanori Sakai | 2016-11-29 |