Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854850 | Substrate processing apparatus, method of manufacturing semiconductor device, method of loading substrate and non-transitory computer-readable recording medium | Yukinao KAGA | 2023-12-26 |
| 10559485 | Method of manufacturing semiconductor device, method of loading substrate and non-transitory computer-readable recording medium | Yukinao KAGA | 2020-02-11 |