Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9650715 | Method of forming metal-containing film | Yukinao KAGA, Tatsuyuki Saito, Masanori Sakai | 2017-05-16 |
| 9472398 | Method of manufacturing semiconductor device and substrate processing apparatus | Tatsuyuki Saito, Masanori Sakai, Yukinao KAGA | 2016-10-18 |
| 9466477 | Method of manufacturing semiconductor device, substrate processing apparatus, and semiconductor device | Tatsuyuki Saito, Masanori Sakai, Yukinao KAGA | 2016-10-11 |
| 9416446 | Semiconductor device manufacturing method and substrate processing apparatus | Tatsuyuki Saito, Masanori Sakai, Yukinao KAGA | 2016-08-16 |
| 9340873 | Semiconductor device manufacturing method and substrate processing apparatus | Tatsuyuki Saito, Masanori Sakai, Yukinao KAGA | 2016-05-17 |
| 9238257 | Method of manufacturing semiconductor device, cleaning method, and substrate processing apparatus | Masanori Sakai, Yukinao KAGA, Tatsuyuki Saito | 2016-01-19 |
| 9045825 | Method of forming metal-containing film | Yukinao KAGA, Tatsuyuki Saito, Masanori Sakai | 2015-06-02 |
| 8808455 | Substrate processing apparatus and method of manufacturing semiconductor device | Tatsuyuki Saito, Masanori Sakai, Yukinao KAGA | 2014-08-19 |
| 8691708 | Method of manufacturing semiconductor device and substrate processing apparatus | Yukinao KAGA, Tatsuyuki Saito, Masanori Sakai | 2014-04-08 |
| 8652258 | Substrate treatment device | Yasuhiro Inokuchi, Katsuhiko Yamamoto, Yoshiaki Hashiba, Yasuhiro Ogawa | 2014-02-18 |
| 8466049 | Semiconductor device producing method with selective epitaxial growth | Yasuhiro Inokuchi, Atsushi Moriya, Katsuhiko Yamamoto, Yoshiaki Hashiba | 2013-06-18 |
| 8123858 | Manufacturing method of semiconductor device and substrate processing apparatus | Jie Wang, Yasuhiro Ogawa, Katsuhiko Yamamoto | 2012-02-28 |