Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7524766 | Method for manufacturing semiconductor device and substrate processing apparatus | Hideharu Itatani, Masayuki Asai, Atsushi Sano | 2009-04-28 |
| 6825126 | Manufacturing method of semiconductor device and substrate processing apparatus | Masayuki Asai, Kanako Kitayama, Masayuki Tsuneda | 2004-11-30 |
| 6787481 | Method for manufacturing semiconductor device | Masayuki Asai, Hisashi Nomura | 2004-09-07 |