Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9786493 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Tatsushi UEDA, Junichi Tanabe, Katsuhiko Yamamoto, Naofumi Ohashi, Hideharu Itatani | 2017-10-10 |
| 9441294 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Katsuhiko Yamamoto | 2016-09-13 |