Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8178445 | Substrate processing apparatus and manufacturing method of semiconductor device using plasma generation | Akito Hirano, Tadashi Terasaki | 2012-05-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8178445 | Substrate processing apparatus and manufacturing method of semiconductor device using plasma generation | Akito Hirano, Tadashi Terasaki | 2012-05-15 |