Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148611 | Substrate processing method, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takaaki Noda, Kazuyuki Okuda, Masato Terasaki | 2024-11-19 |
| 12142476 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Masayuki Asai, Kazuyuki Okuda, Yasuhiro Inokuchi, Norikazu Mizuno | 2024-11-12 |
| 11972934 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Takaaki Noda, Kazuyuki Okuda, Masato Terasaki | 2024-04-30 |
| 11705325 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Masayuki Asai, Kazuyuki Okuda, Yasuhiro Inokuchi, Norikazu Mizuno | 2023-07-18 |
| 11527401 | Method of processing substate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Masayuki Asai, Kazuyuki Okuda, Yasuhiro Inokuchi, Norikazu Mizuno | 2022-12-13 |