Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8367530 | Substrate processing apparatus and manufacturing method of semiconductor device | Kiyohiko Maeda, Takeo Hanashima | 2013-02-05 |
| 7795143 | Substrate processing apparatus and manufacturing method of semiconductor device | Kiyohiko Maeda, Takeo Hanashima | 2010-09-14 |