Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7795143 | Substrate processing apparatus and manufacturing method of semiconductor device | Takeo Hanashima, Masanao Osanai | 2010-09-14 |
| 7534730 | Producing method of semiconductor device and substrate processing apparatus | Takashi Ozaki, Kazuhiro Yuasa | 2009-05-19 |
| 7494941 | Manufacturing method of semiconductor device, and substrate processing apparatus | Osamu Kasahara, Akihiko Yoneda | 2009-02-24 |
| 7432215 | Semiconductor device manufacturing method and semiconductor manufacturing apparatus | Norikazu Mizuno | 2008-10-07 |
| 6716772 | Semiconductor device manufacturing method and semiconductor manufacturing apparatus | Norikazu Mizuno | 2004-04-06 |
| 6524650 | Substrate processing apparatus and method | Takashi Shimahara, Naoto Nakamura, Ichiro Sakamoto | 2003-02-25 |
| 6486083 | Semiconductor device manufacturing method and semiconductor manufacturing apparatus | Norikazu Mizuno | 2002-11-26 |
| 6139642 | Substrate processing apparatus and method | Takashi Shimahara, Naoto Nakamura, Ichiro Sakamoto | 2000-10-31 |
| 5902103 | Vertical furnace of a semiconductor manufacturing apparatus and a boat cover thereof | Satoshi Kakizaki, Tomoshi Taniyama, Hidehiro Yanagawa, Ken Suzaki | 1999-05-11 |