Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10527071 | Fluid control apparatus and method for attaching and detaching gas line section | Masahiko Ochiishi, Takahiro Matsuda, Yuji Saiki | 2020-01-07 |
| 8282737 | Substrate processing apparatus and method for manufacturing a semiconductor device | Takashi Ozaki, Tomoshi Taniyama, Kiyohiko Maeda, Shinya Morita, Yoshikazu Takashima +1 more | 2012-10-09 |
| 8057599 | Substrate processing apparatus and method for manufacturing a semiconductor device | Takashi Ozaki, Tomoshi Taniyama, Kiyohiko Maeda, Shinya Morita, Yoshikazu Takashima +1 more | 2011-11-15 |
| 8043431 | Substrate processing apparatus and method for manufacturing a semiconductor device | Takashi Ozaki, Tomoshi Taniyama, Kiyohiko Maeda, Shinya Morita, Yoshikazu Takashima +1 more | 2011-10-25 |