Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9321333 | Slide door apparatus for vehicle | Ryoichi Fukumoto | 2016-04-26 |
| 9263251 | Method of manufacturing semiconductor device, semiconductor device and substrate processing apparatus | Norikazu Mizuno, Takaaki Noda | 2016-02-16 |
| 9248723 | Slide door apparatus for vehicle | Ryoichi Fukumoto | 2016-02-02 |
| 9238399 | Slide structure for power slide door and cable assembly method for slide door center | Emiko Okuma | 2016-01-19 |
| 9123531 | Method of manufacturing semiconductor device, semiconductor device and substrate processing apparatus | Norikazu Mizuno, Takaaki Noda | 2015-09-01 |
| 8847343 | Method of manufacturing semiconductor device, semiconductor device and substrate processing apparatus | Norikazu Mizuno, Takaaki Noda | 2014-09-30 |
| 8701348 | Slide door device for vehicle | Yoshichika Ito, Junji Yamaguchi | 2014-04-22 |
| 8524580 | Manufacturing method of semiconductor substrate and substrate processing apparatus | Naonori Akae, Yoshiro Hirose | 2013-09-03 |
| 8361902 | Substrate processing apparatus capable of cleaning inside thereof and cleaning control apparatus for controlling cleaning process of substrate processing apparatus | — | 2013-01-29 |
| 8236692 | Method of manufacturing semiconductor device, cleaning method and cleaning control apparatus | — | 2012-08-07 |
| 7884034 | Method of manufacturing semiconductor device and substrate processing apparatus | Yoshiro Hirose, Yushin Takasawa, Nanori Akae | 2011-02-08 |