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Nanori Akae

HE Hitachi Kokusai Electric: 1 patents #493 of 843Top 60%
📍 Toyama, JP: #1,063 of 1,699 inventorsTop 65%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
7884034 Method of manufacturing semiconductor device and substrate processing apparatus Yoshiro Hirose, Yushin Takasawa, Tomohide Kato 2011-02-08