Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11579529 | Positive resist composition and patterning process | Yoshinori Matsui, Masayoshi Sagehashi, Tatsushi Kaneko, Satoshi Watanabe | 2023-02-14 |
| 11499202 | Cooling method for workpiece | Nobuyuki Naito, Yoichi Jinza, Hiroshi Fukuchi, Kazuo Hikida, Ken TAKATA +1 more | 2022-11-15 |
| 11104971 | Mold, mold apparatus, and cooling method for workpiece | Nobuyuki Naito, Yoichi Jinza, Hiroshi Fukuchi, Kazuo Hikida, Ken TAKATA +1 more | 2021-08-31 |
| 9551932 | Patterning process and resist composition | Kenji Funatsu, Kentaro Kumaki, Tomohiro Kobayashi, Koji Hasegawa | 2017-01-24 |
| 9122155 | Sulfonium salt, resist composition and patterning process | Masaki Ohashi, Tomohiro Kobayashi, Masayoshi Sagehashi, Masahiro Fukushima | 2015-09-01 |
| 8956803 | Sulfonium salt, resist composition, and patterning process | Masaki Ohashi, Tomohiro Kobayashi, Masayoshi Sagehashi, Masahiro Fukushima | 2015-02-17 |
| 8871427 | Positive resist composition and patterning process | Ryosuke Taniguchi, Kenji Funatsu, Katsuhiro Kobayashi | 2014-10-28 |
| 8722321 | Patterning process | Tomohiro Kobayashi, Takeshi Kinsho, Kentaro Kumaki | 2014-05-13 |
| 7638260 | Positive resist compositions and patterning process | Shigeo Tanaka, Katsuya Takemura, Tsunehiro Nishi | 2009-12-29 |
| 7618764 | Positive resist compositions and patterning process | Shigeo Tanaka, Katsuya Takemura, Tsunehiro Nishi | 2009-11-17 |
| 7494760 | Photoacid generators, chemically amplified resist compositions, and patterning process | Youichi Ohsawa, Katsuya Takemura | 2009-02-24 |
| 7344827 | Fine contact hole forming method employing thermal flow process | Katsuya Takemura, Eiji Fukuda | 2008-03-18 |
| 7252925 | Nitrogen-containing organic compound, resist composition and patterning process | Takeru Watanabe, Takeshi Kinsho, Katsuya Takemura | 2007-08-07 |
| 6838224 | Chemical amplification, positive resist compositions | Youichi Ohsawa, Jun Watanabe, Takanobu Takeda | 2005-01-04 |
| 6737214 | Chemical amplification resist compositions | Takanobu Takeda, Osamu Watanabe, Kazuhiro Hirahara, Katsuya Takemura, Wataru Kusaki | 2004-05-18 |
| 6682869 | Chemical amplification, positive resist compositions | Youichi Ohsawa, Jun Watanabe, Takanobu Takeda | 2004-01-27 |
| 6395446 | Resist compositions and patterning process | Katsuya Takemura, Youichi Ohsawa, Jun Watanabe, Shigehiro Nagura | 2002-05-28 |
| 5768944 | Vehicular automatic transmission shift device | Takeshi Inuzuka, Masashi Hattori, Tsutae Takeda, Junichi Kurosaki, Masahiro Yamaguchi +1 more | 1998-06-23 |