Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6053980 | Substrate processing apparatus | Atsuhiko Suda, Kazuyuki Toyoda, Makoto Ozawa | 2000-04-25 |
| 5850071 | Substrate heating equipment for use in a semiconductor fabricating apparatus | Katsuyoshi Hamano, Tokunobu Akao | 1998-12-15 |