Issued Patents All Time
Showing 1–25 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10359367 | Inspection apparatus and inspection method | — | 2019-07-23 |
| 10352875 | Inspection apparatus, inspection method, exposure method, and method for manufacturing semiconductor device | Yoshihiko Fujimori | 2019-07-16 |
| 10274835 | Evaluation method and device, processing method, and exposure system | — | 2019-04-30 |
| 9964497 | Inspection method, inspection apparatus, exposure control method, exposure system, and semiconductor device | — | 2018-05-08 |
| 9322788 | Surface inspection apparatus, method for inspecting surface, exposure system, and method for producing semiconductor device | Yoshihiko Fujimori, Shinsuke Takeda | 2016-04-26 |
| 9240356 | Surface inspection apparatus, method for inspecting surface, exposure system, and method for producing semiconductor device | Yoshihiko Fujimori, Shinsuke Takeda | 2016-01-19 |
| 8945954 | Inspection method, inspection apparatus, exposure control method, exposure system, and semiconductor device | — | 2015-02-03 |
| 8705034 | Evaluation device and evaluation method | Yuji Kudo | 2014-04-22 |
| 8687182 | Surface inspection apparatus and surface inspection method | Koichiro Komatsu, Takeo Oomori | 2014-04-01 |
| 8446578 | Defect inspection apparatus, defect inspection method and method of inspecting hole pattern | Mari Sugihara, Takeo Oomori | 2013-05-21 |
| 8441627 | Surface inspection apparatus and surface inspection method | Koichiro Komatsu, Takeo Oomori | 2013-05-14 |
| 8334977 | Evaluation device and evaluation method | Yuji Kudo | 2012-12-18 |
| 8223328 | Surface inspecting apparatus and surface inspecting method | — | 2012-07-17 |
| 7990535 | Surface state detecting apparatus | Takeo Oomori | 2011-08-02 |
| 7834993 | Surface inspection apparatus and surface inspection method | Koichiro Komatsu, Takeo Oomori | 2010-11-16 |
| 7697139 | Surface inspection apparatus | Takeo Oomori | 2010-04-13 |
| 7692780 | Surface inspecting apparatus | Takeo Oomori | 2010-04-06 |
| 7643137 | Defect inspection apparatus, defect inspection method and method of inspecting hole pattern | Mari Sugihara, Takeo Oomori | 2010-01-05 |
| 7557912 | Defect inspection apparatus and defect inspection method | Takeo Oomori | 2009-07-07 |
| 7372557 | Surface defect inspection apparatus and surface defect inspection method | Takeo Oomori | 2008-05-13 |
| 7369224 | Surface inspection apparatus, surface inspection method and exposure system | Takeo Oomori, Yuwa Ishii | 2008-05-06 |
| 7330042 | Substrate inspection system, substrate inspection method, and substrate inspection apparatus | Yasuto Kawashima | 2008-02-12 |
| 7298471 | Surface inspection apparatus and surface inspection method | Koichiro Komatsu, Takeo Oomori | 2007-11-20 |
| 6693293 | Surface inspection apparatus using radiation or light | Takeo Oomori | 2004-02-17 |
| 6654113 | Surface inspection apparatus | Takeo Oomori | 2003-11-25 |