Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10460998 | Method for inspecting substrate, substrate inspection apparatus, exposure system, and method for producing semiconductor device | — | 2019-10-29 |
| 10352875 | Inspection apparatus, inspection method, exposure method, and method for manufacturing semiconductor device | Kazuhiko Fukazawa | 2019-07-16 |
| 9322788 | Surface inspection apparatus, method for inspecting surface, exposure system, and method for producing semiconductor device | Kazuhiko Fukazawa, Shinsuke Takeda | 2016-04-26 |
| 9240356 | Surface inspection apparatus, method for inspecting surface, exposure system, and method for producing semiconductor device | Kazuhiko Fukazawa, Shinsuke Takeda | 2016-01-19 |
| 7907268 | Surface inspection method and surface inspection device | Yuji Kudo | 2011-03-15 |
| 5046109 | Pattern inspection apparatus | Keiichi Hirose | 1991-09-03 |
| 4942619 | Pattern inspecting apparatus | Makoto Takagi, Norio Fujii | 1990-07-17 |
| 4870693 | Mask inspecting apparatus | Tetsuyuki Arai, Shigeru Takemoto | 1989-09-26 |