Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6184526 | Apparatus and method for inspecting predetermined region on surface of specimen using electron beam | Yoshiaki Kohama, Muneki Hamashima | 2001-02-06 |
| 5764361 | Interferometer, adjusting method therefor, stage apparatus having the interferometer, and exposure apparatus having the stage apparatus | Kinya Kato | 1998-06-09 |
| 5200841 | Apparatus for binarizing images | Kenichi Kotaki, Hideo Kimura | 1993-04-06 |
| 4870693 | Mask inspecting apparatus | Tetsuyuki Arai, Yoshihiko Fujimori | 1989-09-26 |