Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE41665 | Object observation apparatus and object observation | Muneki Hamashima, Yoichi Watanabe | 2010-09-14 |
| 7439502 | Electron beam apparatus and device production method using the electron beam apparatus | Mamoru Nakasuji, Tohru Satake, Nobuharu Noji, Hirosi Sobukawa, Tsutomu Karimata +6 more | 2008-10-21 |
| RE40221 | Object observation apparatus and object observation | Muneki Hamashima, Yoichi Watanabe | 2008-04-08 |
| 7244932 | Electron beam apparatus and device fabrication method using the electron beam apparatus | Mamoru Nakasuji, Tohru Satake, Nobuharu Noji, Hirosi Sobukawa, Tsutomu Karimata +6 more | 2007-07-17 |
| 6958477 | Electron beam apparatus, and inspection instrument and inspection process thereof | — | 2005-10-25 |
| 6953944 | Scanning device and method including electric charge movement | Akihiro Goto, Muneki Hamashima, Yukiharu Okubo | 2005-10-11 |
| 6677587 | Electron beam apparatus, and inspection instrument and inspection process thereof | — | 2004-01-13 |
| 6670602 | Scanning device and scanning method | Akihiro Goto, Muneki Hamashima, Yukiharu Okubo | 2003-12-30 |
| 6518582 | Electron beam apparatus, and inspection instrument and inspection process thereof | — | 2003-02-11 |
| 6479819 | Object observation apparatus and object observation | Muneki Hamashima, Yoichi Watanabe | 2002-11-12 |
| 6184526 | Apparatus and method for inspecting predetermined region on surface of specimen using electron beam | Muneki Hamashima, Shigeru Takemoto | 2001-02-06 |
| 5780853 | Scanning electron microscope | Futoshi Mori, Kazuhiko Fukazawa, Hiroshi Hirose | 1998-07-14 |
| 5646403 | Scanning electron microscope | Futoshi Mori, Kazuhiko Fukazawa, Hiroshi Hirose | 1997-07-08 |
| 5466936 | Charged particle microscope | Kaoru Ohmori | 1995-11-14 |