Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8921812 | Reticle protection member, reticle carrying device, exposure device and method for carrying reticle | Motoko Suzuki | 2014-12-30 |
| 8168959 | Reticle protection member, reticle carrying device, exposure device and method for carrying reticle | Motoko Suzuki | 2012-05-01 |
| 7453549 | Reticle protection member, reticle carrying device, exposure device and method for carrying reticle | Motoko Suzuki | 2008-11-18 |
| 7439502 | Electron beam apparatus and device production method using the electron beam apparatus | Mamoru Nakasuji, Tohru Satake, Nobuharu Noji, Hirosi Sobukawa, Tsutomu Karimata +6 more | 2008-10-21 |
| 7244932 | Electron beam apparatus and device fabrication method using the electron beam apparatus | Mamoru Nakasuji, Tohru Satake, Nobuharu Noji, Hirosi Sobukawa, Tsutomu Karimata +6 more | 2007-07-17 |
| 6977377 | Charged particle beam control element, method of fabricating charged particle beam control element, and charged particle beam apparatus | — | 2005-12-20 |
| 6953944 | Scanning device and method including electric charge movement | Yoshiaki Kohama, Akihiro Goto, Muneki Hamashima | 2005-10-11 |
| 6900878 | Reticle-holding pods and methods for holding thin, circular reticles, and reticle-handling systems utilizing same | Hidekazu Kikuchi | 2005-05-31 |
| 6781123 | Charged particle beam control element, method of fabricating charged particle beam control element, and charged particle beam apparatus | — | 2004-08-24 |
| 6735867 | Method of making a static pressure air bearing | Takuma Tsuda, Shinji Shinohara, Shinobu Tokushima, Toshimasa Shimoda, Douglas C. Watson +1 more | 2004-05-18 |
| 6670602 | Scanning device and scanning method | Yoshiaki Kohama, Akihiro Goto, Muneki Hamashima | 2003-12-30 |
| 6583597 | Stage apparatus including non-containing gas bearings and microlithography apparatus comprising same | Keiichi Tanaka, Hiroaki Narushima, Yukio Kakizaki, Yasushi Yoda | 2003-06-24 |
| 6566658 | Charged particle beam control element, method of fabricating charged particle beam control element, and charged beam apparatus | — | 2003-05-20 |
| 6499880 | Static pressure air bearing | Takuma Tsuda, Shinji Shinohara, Shinobu Tokushima, Toshimasa Shimoda, Douglas C. Watson +1 more | 2002-12-31 |
| 6351041 | Stage apparatus and inspection apparatus having stage apparatus | — | 2002-02-26 |
| 6328473 | Static air-bearing and stage apparatus using the bearing and optical apparatus using the stage apparatus | Shinobu Tokushima, Toshimasa Shimoda | 2001-12-11 |
| 6267131 | Method of controlling pressure in a chamber, apparatus for the same, and exposure apparatus | Mutsuo Masada, Masao Nakata, Masahiro Shiraishi, Makoto Ogawa, Katsuhiro Kato | 2001-07-31 |
| 5633755 | Projection apparatus and method | Yuji Manabe, Kazuya Okamoto, Yutaka Iwasaki | 1997-05-27 |