Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6735867 | Method of making a static pressure air bearing | Takuma Tsuda, Shinji Shinohara, Yukiharu Okubo, Toshimasa Shimoda, Douglas C. Watson +1 more | 2004-05-18 |
| 6499880 | Static pressure air bearing | Takuma Tsuda, Shinji Shinohara, Yukiharu Okubo, Toshimasa Shimoda, Douglas C. Watson +1 more | 2002-12-31 |
| 6328473 | Static air-bearing and stage apparatus using the bearing and optical apparatus using the stage apparatus | Yukiharu Okubo, Toshimasa Shimoda | 2001-12-11 |