| 9708955 |
Exhaust purifying device |
Akira Ito, Akihiro Miki, Mitsuyoshi Kimura |
2017-07-18 |
| 8687182 |
Surface inspection apparatus and surface inspection method |
Kazuhiko Fukazawa, Koichiro Komatsu |
2014-04-01 |
| 8446578 |
Defect inspection apparatus, defect inspection method and method of inspecting hole pattern |
Mari Sugihara, Kazuhiko Fukazawa |
2013-05-21 |
| 8441627 |
Surface inspection apparatus and surface inspection method |
Kazuhiko Fukazawa, Koichiro Komatsu |
2013-05-14 |
| 7990535 |
Surface state detecting apparatus |
Kazuhiko Fukazawa |
2011-08-02 |
| 7834993 |
Surface inspection apparatus and surface inspection method |
Kazuhiko Fukazawa, Koichiro Komatsu |
2010-11-16 |
| 7697139 |
Surface inspection apparatus |
Kazuhiko Fukazawa |
2010-04-13 |
| 7692780 |
Surface inspecting apparatus |
Kazuhiko Fukazawa |
2010-04-06 |
| 7643137 |
Defect inspection apparatus, defect inspection method and method of inspecting hole pattern |
Mari Sugihara, Kazuhiko Fukazawa |
2010-01-05 |
| 7557912 |
Defect inspection apparatus and defect inspection method |
Kazuhiko Fukazawa |
2009-07-07 |
| 7372557 |
Surface defect inspection apparatus and surface defect inspection method |
Kazuhiko Fukazawa |
2008-05-13 |
| 7369224 |
Surface inspection apparatus, surface inspection method and exposure system |
Kazuhiko Fukazawa, Yuwa Ishii |
2008-05-06 |
| 7307725 |
Surface inspection apparatus, polarization illuminating device and light-receiving device |
Hideo Hirose, Yasuharu Nakajima, Kenzo Chiaki, Tatsumi Satou |
2007-12-11 |
| 7298471 |
Surface inspection apparatus and surface inspection method |
Kazuhiko Fukazawa, Koichiro Komatsu |
2007-11-20 |
| 6774987 |
Surface inspection method, surface inspection apparatus, and recording medium and data signal for providing surface inspection program |
Koichiro Komatsu |
2004-08-10 |
| 6693293 |
Surface inspection apparatus using radiation or light |
Kazuhiko Fukazawa |
2004-02-17 |
| 6654113 |
Surface inspection apparatus |
Kazuhiko Fukazawa |
2003-11-25 |
| 6646735 |
Surface inspection apparatus and surface inspection method |
Kazuhiko Fukazawa, Mari Yamamoto |
2003-11-11 |
| 6563577 |
Defect testing apparatus and defect testing method |
Koichiro Komatsu |
2003-05-13 |
| 6512579 |
Defect inspection apparatus |
Kinya Kato |
2003-01-28 |