| 8687182 |
Surface inspection apparatus and surface inspection method |
Kazuhiko Fukazawa, Takeo Oomori |
2014-04-01 |
| 8441627 |
Surface inspection apparatus and surface inspection method |
Kazuhiko Fukazawa, Takeo Oomori |
2013-05-14 |
| 8403687 |
Data storage device and printing apparatus including the same |
Tsukasa Abe |
2013-03-26 |
| 8049901 |
Measuring device and measuring method |
Hiroshi Aoki |
2011-11-01 |
| 7834993 |
Surface inspection apparatus and surface inspection method |
Kazuhiko Fukazawa, Takeo Oomori |
2010-11-16 |
| 7322335 |
Oil pan structure |
Yoshinori Suzuki, Hisayoshi Kato |
2008-01-29 |
| 7324274 |
Microscope and immersion objective lens |
Hiromasa Shibata |
2008-01-29 |
| 7311378 |
Wiping apparatus and imaging apparatus provided therewith, method of manufacturing electro-optical device, electro-optical device, and electronic apparatus |
Kazuyoshi Fujimori, Toru Shirasaki |
2007-12-25 |
| 7298471 |
Surface inspection apparatus and surface inspection method |
Kazuhiko Fukazawa, Takeo Oomori |
2007-11-20 |
| 6774987 |
Surface inspection method, surface inspection apparatus, and recording medium and data signal for providing surface inspection program |
Takeo Oomori |
2004-08-10 |
| 6563577 |
Defect testing apparatus and defect testing method |
Takeo Oomori |
2003-05-13 |
| 6512578 |
Method and apparatus for surface inspection |
Takeo Omori, Toshiaki Kitamura |
2003-01-28 |
| 6313913 |
Surface inspection apparatus and method |
Yumi Nakagawa |
2001-11-06 |
| 6097483 |
Image detection apparatus |
— |
2000-08-01 |
| 5907396 |
Optical detection system for detecting defects and/or particles on a substrate |
Hideyuki Tashiro, Tsuneyuki Hagiwara |
1999-05-25 |
| 5859707 |
Position detection apparatus and aligner comprising same |
Masahiro Nakagawa, Ayako Sugaya, Masashi Tanaka |
1999-01-12 |
| 5171999 |
Adjustable beam and interference fringe position |
Hideo Mizutani, Nobutaka Magome, Kazuya Ota |
1992-12-15 |
| 5070250 |
Position detection apparatus with adjustable beam and interference fringe positions |
Hideo Mizutani, Nobutaka Magome, Kazuya Ota |
1991-12-03 |
| 5028934 |
Hand-held portable printing system |
Kazuaki Kasai, Masahiro Minowa, Ikuo Ito |
1991-07-02 |