Issued Patents All Time
Showing 1–25 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10634991 | Container for storing a pellicle for lithography | — | 2020-04-28 |
| 10421353 | Fuel supply apparatus | Atsushi Sekihara, Yoshinari Hiramatsu, Shinji Shimokawa | 2019-09-24 |
| 10088745 | Pellicle for EUV exposure | Akinori Nishimura | 2018-10-02 |
| 10029560 | Fuel supply apparatus | Atsushi Sekihara, Yoshinari Hiramatsu, Shinji Shimokawa | 2018-07-24 |
| 9817308 | Pellicle | — | 2017-11-14 |
| 9268213 | Pellicle for lithogrpahy | — | 2016-02-23 |
| 8722285 | Pellicle for lithography | Junichi Tsukada | 2014-05-13 |
| 8652711 | Pellicle for lithography | — | 2014-02-18 |
| 8582077 | Pellicle, mounting method therefor, pellicle-equipped mask, and mask | — | 2013-11-12 |
| 8467035 | Pellicle frame and lithographic pellicle | Kishore K. Chakravorty, David Mushell, Grace Ng | 2013-06-18 |
| 8426083 | Pellicle for lithography | — | 2013-04-23 |
| 8426084 | Pellicle for lithography | Kenichi Fukuda | 2013-04-23 |
| 8394557 | Lithographic pellicle | Kenichi Fukuda | 2013-03-12 |
| 8383297 | Pellicle for lithography and method for manufacturing pellicle film | Kunihiro Ito | 2013-02-26 |
| 8356849 | Pellicle handling tool | — | 2013-01-22 |
| 8349526 | Pellicle for lithography | — | 2013-01-08 |
| 8309279 | Pellicle for lithography | — | 2012-11-13 |
| 8293433 | Pellicle for lithography and a method for making the same | Junichi Tsukada | 2012-10-23 |
| 8220654 | Fuel tank structure | Touru Suda, Masayuki Hirose, Takayuki Usui, Taku Masaki, Hiroaki Suganuma | 2012-07-17 |
| 8221944 | Pellicle frame and lithographic pellicle | Kishore K. Chakravorty, David Mushell, Grace Ng | 2012-07-17 |
| 8221945 | Pellicle frame and lithographic pellicle | Kishore K. Chakravorty, David Mushell, Grace Ng | 2012-07-17 |
| 8173330 | Pellicle | — | 2012-05-08 |
| 7968252 | Pellicle frame | — | 2011-06-28 |
| 7914952 | Lithographic pellicle | — | 2011-03-29 |
| 7901841 | Pellicle for photolithography | — | 2011-03-08 |