Issued Patents All Time
Showing 1–25 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10520825 | Illumination optical system, exposure apparatus and device manufacturing method | — | 2019-12-31 |
| 10241417 | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method | Osamu Tanitsu, Hiroyuki Hirota, Tomoyuki Matsuyama | 2019-03-26 |
| 10234770 | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method | Osamu Tanitsu, Hiroyuki Hirota, Tomoyuki Matsuyama | 2019-03-19 |
| 10168620 | Illumination optical system, exposure apparatus and device manufacturing method | — | 2019-01-01 |
| 10007194 | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method | Osamu Tanitsu, Hiroyuki Hirota, Tomoyuki Matsuyama | 2018-06-26 |
| 9563130 | Illumination optical system, exposure apparatus and device manufacturing method | — | 2017-02-07 |
| 9429848 | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method | Osamu Tanitsu, Hiroyuki Hirota | 2016-08-30 |
| 9423694 | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method | Osamu Tanitsu, Hiroyuki Hirota, Tomoyuki Matsuyama | 2016-08-23 |
| 9235133 | Lighting optical device, regulation method for lighting optical device, exposure system, and exposure method | Hirohisa Tanaka | 2016-01-12 |
| 9140990 | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method | Osamu Tanitsu, Hiroyuki Hirota, Tomoyuki Matsuyama | 2015-09-22 |
| 8934086 | Illumination optical system, exposure apparatus and device manufacturing method | — | 2015-01-13 |
| 8325324 | Illuminating optical apparatus, exposure apparatus and device manufacturing method | Osamu Tanitsu | 2012-12-04 |
| 8004658 | Lighting optical device, exposure system, and exposure method | — | 2011-08-23 |
| 7808828 | Non volatile memory | Ryotaro Sakurai, Hitoshi Tanaka, Satoshi Noda | 2010-10-05 |
| 7558107 | Non volatile memory | Ryotaro Sakurai, Hitoshi Tanaka, Satoshi Noda | 2009-07-07 |
| 7426136 | Non volatile memory | Ryotaro Sakurai, Hitoshi Tanaka, Satoshi Noda | 2008-09-16 |
| 7154585 | Projection optical system, exposure apparatus, and device production method | Youhei Fujishima, Yasuhiro Omura, Toshiro Ishiyama | 2006-12-26 |
| 6947121 | Projection optical system, a projection exposure apparatus provided with the same, as well as a device manufacturing method | — | 2005-09-20 |
| 6912155 | Non volatile memory | Ryotaro Sakurai, Hitoshi Tanaka, Satoshi Noda | 2005-06-28 |
| 6912094 | Projection optical system, a projection exposure apparatus, and a projection exposure method | Masayuki Mizusawa, Youhei Fujishima, Miho Matsumoto | 2005-06-28 |
| 6700645 | Projection optical system and exposure apparatus and method | — | 2004-03-02 |
| 6600550 | Exposure apparatus, a photolithography method, and a device manufactured by the same | — | 2003-07-29 |
| 6567319 | Nonvolatile semiconductor memory with controlled supply of boosted voltage | Hiroshi Sato, Satoshi Noda, Kiichi Manita, Shoji Kubono | 2003-05-20 |
| 6418065 | Nonvolatile semiconductor memory | Hiroshi Sato, Satoshi Noda, Kiichi Manita, Shoji Kubono | 2002-07-09 |
| 6333781 | Projection optical system and exposure apparatus and method | — | 2001-12-25 |