Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7154585 | Projection optical system, exposure apparatus, and device production method | Koji Shigematsu, Youhei Fujishima, Yasuhiro Omura | 2006-12-26 |
| 5771125 | Catadioptric system for photolithography | — | 1998-06-23 |
| 5694241 | Catadioptric reduction projection optical system and exposure apparatus employing the same | Yutaka Suenaga | 1997-12-02 |
| 5668673 | Catadioptric reduction projection optical system | Yutaka Suenaga, Yoshiyuki Shimizu, Kiyoshi Hayashi | 1997-09-16 |
| 5592329 | Catadioptric optical system | Yutaka Suenaga | 1997-01-07 |
| 5477388 | Inverse telescopic wide angle lens | Yutaka Suenaga, Yoshiyuki Shimizu | 1995-12-19 |
| 5434425 | Optical position detecting apparatus | — | 1995-07-18 |
| 5321553 | Zoom lens | Kenzaburo Suzuki | 1994-06-14 |
| 5321554 | Inverse telescopic wide angle lens | Yoshiyuki Shimizu | 1994-06-14 |