Issued Patents All Time
Showing 26–50 of 58 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8611013 | Optical integrator, illumination optical device, aligner, and method for fabricating device | — | 2013-12-17 |
| 8456624 | Inspection device and inspecting method for spatial light modulator, illumination optical system, method for adjusting the illumination optical system, exposure apparatus, and device manufacturing method | Hirohisa Tanaka | 2013-06-04 |
| 8451427 | Illumination optical system, exposure apparatus, optical element and manufacturing method thereof, and device manufacturing method | — | 2013-05-28 |
| 8446579 | Inspection device and inspecting method for spatial light modulator, illumination optical system, method for adjusting the illumination optical system, exposure apparatus, and device manufacturing method | Hirohisa Tanaka | 2013-05-21 |
| 8379187 | Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method | — | 2013-02-19 |
| 8325324 | Illuminating optical apparatus, exposure apparatus and device manufacturing method | Koji Shigematsu | 2012-12-04 |
| 8139198 | Exposure apparatus, exposure method, and method for producing device | Hisashi Nishinaga, Ikuo Hikima, Mitsunori Toyoda, Masahiro Nakagawa, Tsuneyuki Hagiwara +3 more | 2012-03-20 |
| 8094290 | Illumination optical apparatus, exposure apparatus, and device manufacturing method | Soichi Owa, Hirohisa Tanaka | 2012-01-10 |
| 8039807 | Exposure apparatus, exposure method, and method for producing device | — | 2011-10-18 |
| 7515247 | Illumination optical system, exposure apparatus, and exposure method with polarized state fluctuation correcting device | Hirohisa Tanaka, Kenichi Muramatsu, Norio Komine, Hisashi Nishinaga, Tomoyuki Matsuyama +1 more | 2009-04-07 |
| 7515248 | Illumination optical system, exposure apparatus, and exposure method with polarized state detection result and adjustment | Hirohisa Tanaka, Kenichi Muramatsu, Norio Komine, Hisashi Nishinaga, Tomoyuki Matsuyama +1 more | 2009-04-07 |
| 7423731 | Illumination optical system, exposure apparatus, and exposure method with polarized switching device | Hirohisa Tanaka, Kenichi Muramatsu, Norio Komine, Hisashi Nishinaga, Tomoyuki Matsuyama +1 more | 2008-09-09 |
| RE39846 | Illumination optical apparatus and scanning exposure apparatus | Takashi Mori, Noriaki Yamamoto | 2007-09-18 |
| 7095560 | Diffractive optical device, refractive optical device, illumination optical system, exposure apparatus and exposure method | Mitsunori Toyoda | 2006-08-22 |
| 6913373 | Optical illumination device, exposure device and exposure method | Hirohisa Tanaka, Mitsunori Toyoda | 2005-07-05 |
| 6741394 | Optical integrator, illumination optical apparatus, exposure apparatus and observation apparatus | Yuji Kudo, Mitsunori Toyoda, Masato Shibuya | 2004-05-25 |
| 6597430 | Exposure method, illuminating device, and exposure system | Kenji Nishi, Kyoji Nakamura | 2003-07-22 |
| 6563567 | Method and apparatus for illuminating a surface using a projection imaging apparatus | Hideki Komatsuda, Akihiko Goto, Nobumichi Kanayamaya, Masato Shibuya, Tetsuo Takahashi | 2003-05-13 |
| 6238063 | Illumination optical apparatus and projection exposure apparatus | Masato Shibuya, Nobumichi Kanayamaya | 2001-05-29 |
| 6236449 | Illumination optical apparatus and exposure apparatus | — | 2001-05-22 |
| 6106139 | Illumination optical apparatus and semiconductor device manufacturing method | Kayo Sugiyama | 2000-08-22 |
| 6081320 | Illumination apparatus and exposure apparatus | — | 2000-06-27 |
| 5986744 | Projection optical system, illumination apparatus, and exposure apparatus | Yuji Kudo | 1999-11-16 |
| 5963306 | Exposure apparatus and methods for using the same | Kayo Sugiyama | 1999-10-05 |
| 5955243 | Illumination optical system and method of manufacturing semiconductor devices | — | 1999-09-21 |