Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7968330 | Culture observation equipment | Takayuki Uozumi | 2011-06-28 |
| 7889320 | Variable slit apparatus, illumination apparatus, exposure apparatus, exposure method, and device fabrication method | Eizo Ohya, Yasushi Mizuno | 2011-02-15 |
| 6961114 | Optical apparatus and exposure apparatus incorporating the apparatus | Masayuki Murayama, Taro Ogata, Susumu Mori | 2005-11-01 |
| 6727981 | Illuminating optical apparatus and making method thereof, exposure apparatus and making method thereof, and device manufacturing method | Taichi Taniuchi, Eizo Ohya, Hiromitsu Yoshimoto | 2004-04-27 |
| 6597430 | Exposure method, illuminating device, and exposure system | Kenji Nishi, Osamu Tanitsu | 2003-07-22 |
| 5484026 | Handheld electromotive tool with sensor | Toshikazu Susaki | 1996-01-16 |
| 5400515 | Water-proof structure for measuring apparatus | — | 1995-03-28 |
| 5365801 | Coarse/fine adjustment of a rotary body | — | 1994-11-22 |