Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7889320 | Variable slit apparatus, illumination apparatus, exposure apparatus, exposure method, and device fabrication method | Kyoji Nakamura, Yasushi Mizuno | 2011-02-15 |
| 6727981 | Illuminating optical apparatus and making method thereof, exposure apparatus and making method thereof, and device manufacturing method | Taichi Taniuchi, Kyoji Nakamura, Hiromitsu Yoshimoto | 2004-04-27 |