Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6106139 | Illumination optical apparatus and semiconductor device manufacturing method | Osamu Tanitsu | 2000-08-22 |
| 5963306 | Exposure apparatus and methods for using the same | Osamu Tanitsu | 1999-10-05 |
| 5867319 | Illumination optical system, an exposure apparatus having the illumination system, and a method for manufacturing a semiconductor device | Yuji Kudo, Osamu Tanitsu | 1999-02-02 |