Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6563567 | Method and apparatus for illuminating a surface using a projection imaging apparatus | Hideki Komatsuda, Osamu Tanitsu, Akihiko Goto, Masato Shibuya, Tetsuo Takahashi | 2003-05-13 |
| 6238063 | Illumination optical apparatus and projection exposure apparatus | Osamu Tanitsu, Masato Shibuya | 2001-05-29 |