Issued Patents All Time
Showing 51–58 of 58 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5912725 | Illumination optical system to be used in an exposure apparatus and a method of manufacturing a semiconductor structure using the exposure apparatus | — | 1999-06-15 |
| 5867319 | Illumination optical system, an exposure apparatus having the illumination system, and a method for manufacturing a semiconductor device | Kayo Sugiyama, Yuji Kudo | 1999-02-02 |
| 5790239 | Illumination optical apparatus containing an optical integrator and projection exposure apparatus using the same | Hideki Komatsuda | 1998-08-04 |
| 5731577 | Illumination apparatus and projection exposure apparatus using the same | — | 1998-03-24 |
| 5669708 | Optical element, production method of optical element, optical system, and optical apparatus | Kiyoto Mashima, Takashi Mori | 1997-09-23 |
| 5640284 | Optical reflector, illumination optical system, light source system and illumination optical apparatus | Takashi Mori, Hideo Hirose | 1997-06-17 |
| 5636003 | Illumination optical apparatus and scanning exposure apparatus | Takashi Mori, Noriaki Yamamoto | 1997-06-03 |
| 5581605 | Optical element, production method of optical element, optical system, and optical apparatus | Katsuhiko Murakami, Kiyoto Mashima, Takashi Mori | 1996-12-03 |