Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4789242 | Optical apparatus for detecting the position of an object | Makoto Uehara, Koichi Matsumoto | 1988-12-06 |
| 4723846 | Optical path length compensating optical system in an alignment apparatus | Makoto Uehara, Kazumasa Endo, Susumu Mori, Yukio Kakizaki | 1988-02-09 |